GENERAL RULES AND RESTRICTIONS
The following rules are to be observed by all persons
qualified to work in CDR's LCD Laboratory:
- The only individuals
qualified to work in the cleanroom are those who have satisfied all
conditions in the document entitled, "Who is allowed to work in the
Cleanroom". (Document pending publication 99/1/12).
- Wash hands before entering
the cleanroom.
- NO makeup shall be worn
inside the cleanroom.
- Food and drinks are prohibited in the clean room.
- Smoking is not allowed 30
minutes before entering the cleanroom.
- Chewing gum is not allowed
in the cleanroom.
- Avoid wearing contacts.
Contacts can absorb vapors or trap chemicals in the space between the lens
and the eye. In an emergency eye muscles may spasm , preventing removal of the contact lens.Contacts may thus interfere with
flushing the eye with water and allow the eyes long and intimate contact
with toxic chemicals. If you take your contacts before you enter, don't
bring them into the lab and store them near volatile chemicals. Leave them
in a safe place outside of the lab.
- Check your clothing.
Everyone must wear full-length pants when using the lab. You may put on a
pair of pants over shorts. Avoid gowning over bare legs. Do not enter
wearing sandals or open-toed shoes. Wear shoes made of leather that
completely cover the foot. Do not wear muddy shoes. If you step in a mud
puddle on the way to the cleanroom, you're out of luck.
- Only use pens and cleanroom
paper. Lead pencils are not allowed in the cleanroom.
- Bunny suits, booties,
mustache/beard nets, and gloves must be worn at ALL times in the
cleanroom.
- Your name MUST appear on
the QUALIFIED USER LIST to operate ANY piece of equipment in the
CLEANROOM. Exceptions are the following only:
Non-programmable apparatus in the LAF benches.
Compressed air guns, DI water and Vac Chamber N2 supply.
- All cleanroom equipment
usage must be entered in the respective log manual along with any unusual
occurances.
- Chemical and gas usage must
be recorded in the log sheets.
- Nonessential items of
equipment (tools, books, etc.) will not be allowed to accumulate and will
be removed from the lab at the discretion of the CDR Cleanroom Manager.
- Gloves must be worn at all
times inside the cleanroom.
- Try not to sneeze or cough
in the cleanroom. Don't breathe directly on a clean surface or wafer.
Singing, whistling, and chewing gum also produce severe contamination. Do
not let your skin touch any surface in the cleanroom. In particular, don't
touch your face and then a lab surface. Your skin will leave behind oils.
If you believe something has been contaminated, contact the lab manager or
lab technician.
- Once inside the cleanroom,
there are a few precautions you can take to maintain cleanroom integrity.
Do not violate the Air Shower . Be aware if you
tear any part of your bunny suit or booties. Move slowly and carefully to
minimize air turbulence. Don't slam any of the doors; this also creates
turbulence and shakes the partitions, resulting in additional
contamination.
- Always clean up your work
area before you leave. Thoroughly rinse the beakers you used with DI water
and then store upside-down in their appropriate locations.
SAFETY RULES AND RESTRICTIONS
The following safety rules are to be observed by all persons
qualified to work in the CDR Cleanroom.
LCD Substrates/ Finished cells must be treated with care to avoid glass
breakage and potential personal injury.
Broken work pieces should be carefully disposed of in the alotted glass bin;
never mix other solid waste with broken glass, personal injury may result.
In general, when handling glass work pieces, avoid sudden or
violent motion. Never "shove" work pieces against hard objects
or try to force them apart when assembled!
Photoresists used by CDR are delivered in liquid form. Such liquids may
contain harmfull solvents and care must be taken to avoid dermal contact or
prolonged exposure to the vapours; some photoresist types are known to cause
birth defects in pregnant women!
Safety gear must be worn at all times.
Spills must be dealt with immediately and the resultant soiled material
disposed of properly in the fire proof waste bins.
The Liquid Crystal alignment layer - generally a polyimide - is delivered in
liquid form. Such liquids may contain organic solvents capable of developing
contact dermatitis, hepatital or renal damage if swallowed or inhaled over long
periods of time.
Specific polyimide solutions are known to contain mutagenic solvents!
Care must be exercised when handling alignment layer solutions and adequate
safety precautions observed. (Eye, Skin, body protection).
Spills must be dealt with immediately and the resultant soiled materials
disposed of properly, in the fire proof waste containers.
Polyimide solutions are flammable!
Modern Liquid Crystal Materials (LCM's) - those available after the late
70's - are not known to be harmful, however, adequate
protection must be taken to avoid dermal contact or ingestion. LCM's do not
produce vapours, except at very high temperatures; typically in excess of 200
C. In the event, avoid inhaling the fumes.
Spills should be dealt with promptly and the resultant soiled material disposed
of properly, in the fire proof waste containers.
The adhesive materials used by CDR are delivered in liquid or paste form.
Such materials are not considered to be dangerous, however, adequate precautions must be taken to prevent dermal contact or ingestion.
Spills must be dealt with immediately and the resultant soiled material
disposed of properly in the fire proof waste containers.
LCD spacing material is not known to be harmful, however, adequate precautions must be taken to avoid inhalation of such fine
particles.
Spills must be dealt with immediately (never re-use spilt material) and
the resultant soiled material SEALED in plastic (bagged) and disposed of
properly in the fire proof waste containers.
Some process chemicals used in the CDR Facility may be hazardous. Table 1
below lists some of the more common chemicals used in the lab and their
concentrations. Some concentrations, necessary for LCD fabrication, may be much
higher than those found in conventional undergraduate chemistry labs. Some of
these chemicals may cause severe damage to human tissue. Therefore, you must be
alert and cautious when using these chemicals to avoid all contact with them.
When you follow the safety procedures below, your risk of injury will be
minimized.
(List to be completed when all CDR's chemicals are
documented. 99/1/12). |
- Rinse the heavy chemical
gloves with DI water before you take them off.
- Always clean up your work
area before you leave. Soiled surfaces may gently wiped clean with a cleanroom wiper and 2Prop. The soiled wiper should then be
disposed of in the fire proof waste bin.
- Though a seldom occurance,
spillages of LC Fluid and Epoxy may be wiped up with a cleanroom wiper and
Acetone. In this event ALWAYS use gloves and remove the soiled wiper to
the fire proof waste bin immediately
- A fire extenguisher is
located in the Cleanroom, another is
located in the Scribing area; both are CO2 suitable for
use with electrical fires.
- (Gas masks)
- Tell your supervisor about
any unsafe situation. Use your judgment. For example, if a process or
chemical is left unatteneded, report it. Don't touch other peoples work
yourself, inform the cleanroom staff.
- If you are not sure
something is safe, ask your supervisor. Use common sense. There are no
unexpected dangers in the CDR lab, but do not touch anything unless you
are sure you understand it.
- Wear safety glasses when
using the spinner. The spinner sometimes breaks LCD substrates, and
eyes must be protected from the risk of flying glass.
- It is a good habit to
always wear safety glasses in the CDR cleanroom,
taking them off only to use a microscope. This is a rule for everyone in a
room when someone in that room is doing spin, develop,
etch, or strip. Aprons are available to protect your clothing. A drop of
photoresist may splash onto your clothing and make a permanent spot. The
spinner is well ventilated; if you smell the solvent in the room,
discontinue work and notify the lab superior. Open your resist dispensor
close to the spinner chuck; opening far away from the chuck ventilation
may cause other students to smell the solvent. Some of these solvents are
known to cause birth defects when inhaled by pregnant women.
- ITO Etchant and Resist
stripper can cause severe burns; protective clothing, gloves and glasses
must be worn when handling these substances.
- Wash your hands when you
leave the microfabrication lab.
- Policies for Gases: ALL
GAS CYLINDERS MUST BE FIRMLY SECURED TO PREVENT PERSONAL INJURY.
- New gas cylinders
should be labeled with the date of arrival.
- Empty gas cylinders
should be labeled with date it was noted empty.
- Empty gas cylinders
should be stored in gas storage cabinets
- Policy for Chemical
Storage:
- Chemicals are stored
based upon their contents and color code. Only store chemicals in their
appropriately labeled cabinets and locations.
- Policies for Acid and
Bases:
- When handling acids
or bases, gloves, apron, face shield, and lab coat must be worn.
- All acid and base
work must be done with the designated apparatus.
- Acids are stored in
the cabinet labeled "ACIDS". For example: Nitric Acid, Hydrochloric Acid
- Bases are stored in
the cabinet labeled "BASES". For example: Sodium Hydroxide, Potassium Hydroxide, Positive Photoresist Stripper, Positive Photoresist Developer
- Never work with acid
and bases side by side because violent reactions can occur.
- Disposal of acids of
bases through the drain can occur only after a pH level between 6 and 8
is achieved through neutralization.
- Storage of waste
acids will be done by storing the acids in clearly labeled waste
containers for that particular acid. Do not mix the acids together. Waste
acids should be stored in separate containers in the acid cabinet.
- Neutralization of the
acids is done by taking approximately equal parts of Sodium Hydroxide
solution placed in an open polypropylene container and slowly adding an
equal part of acid until a pH between 5 and 8 is reached. Always pour the
acid into the Sodium Hydroxide solution.
- Storage of waste
bases will be done by storing the bases in a clearly labeled waste
container.
- Neutralization of the
bases is done by adding Hydrochloric Acid to the base solution in an open
polypropylene container in an exhausted fumehood until a pH between 6 and
8 is reached. Always pour the acid into the base.
- Storage of the waste
acids will be in the acid cabinets and storage of the waste bases will be
in the base cabinet.
- If any acids or bases
are purchased by individual faculty or students, they must take the
responsibility for the neutralization by purchasing the neutralization
chemicals and mixing of the chemicals to achieve a pH between 6 and 8
before disposal down the drain with large quantities of running water.
- Small quantities of
concentrated acids or bases (less than 75ml) can be poured down the drain
as long as it is diluted with large amounts of tap water (not DI water).
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