TFT Prototyping Line in NFF
ASM LB 45 LPCVD & Thermco TMX9001 LPCVD Furnace Varian CF3000 Ion Implanter ASM LB45 Diffusion Furnace SUSS Manual Resist Coater
For amorphous silicon / low temperature SiO2 deposition For source / drain doping For N2 anneal / FGA process For photoresist coating
http://www.nff.ust.hk/FurAB.jpg http://www.nff.ust.hk/C00024.jpg http://www.nff.ust.hk/C00045.jpg http://www.nff.ust.hk/eq_SUSScoater.jpg
       
ASML 5000 Stepper SUSS Microtec MA6 Hot plates Oven
For photolithography For photolithography For soft / hard bake For soft / hard bake
http://www.nff.ust.hk/eq_Stepper.jpg http://www.nff.ust.hk/eq_MA6.jpg http://www.nff.ust.hk/eq_hotpad.jpg http://www.nff.ust.hk/eq_Oven.jpg
       
AME8110 Reactive Ion Etcher Branson IPC2000 Photo Resist Asher Wet Station Varian 3180 sputtering
For silicon / SiO2 dry etching For photoresist stripping For cleaning / wet etching For Al /Al-Si sputtering
http://www.nff.ust.hk/eq_ame8110.jpg http://www.nff.ust.hk/eq_Branson%20IPC2000.jpg http://www.nff.ust.hk/eq_wetstationCD.jpg http://www.nff.ust.hk/eq_3180.jpg
       
AJA Sputtering J.A. Woollam M-2000V Multi-Wavelength Ellipsometer Four Dimensions 280C Four-Point-Probe Mapping System Atomic Force Microscope XE150S
For Nickel sputtering For thin film thickness measurement For sheet resistance measurement For surface roughness measurement
MG_2998 http://www.nff.ust.hk/eq_Ellipsometer.JPG http://www.nff.ust.hk/eq_4ptPobe.jpg http://www.nff.ust.hk/eq_AFM-XE150S.jpg